For citations:
Ryskaliyeva M.M., Kusainova A.Z., Eshanov A., Zhirkov I.V., Akhadov J.Z., Sultanov A.T., Beisenkhanov N.B. ANALYZING THE EFFECTS OF SPIN-COATED PHOSPHOSILICATE GLASS ON THE CRYSTALLIZATION PROCESS OF SILICON THIN FILMS DEPOSITED VIA MAGNETRON SPUTTERING. Herald of the Kazakh-British Technical University. 2026;23(3):486-497. (In Russ.) https://doi.org/10.55452/1998-6688-2026-23-3-486-497
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