For citations:
Muratov M.M., Zaitsev S.I., Pshikov M.I., Guseinov N.R., Nemkayeva R.R., Mukhametkarimov Ye.S., Tolepov Zh.K., Akhmetsadyk D.S. DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION. Herald of the Kazakh-British Technical University. 2025;22(3):280-289. https://doi.org/10.55452/1998-6688-2025-22-3-280-289
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