For citations:
Rakhimova A.Zh., Zhirkov I.V., Nussupov K.Kh., Beisenkhanov N.B., Sultanov A.T. Effect of oxygen flow on electrical and optical properties of ITO films synthesized by magnetron sputtering method. Herald of the Kazakh-British technical university. 2023;20(4):109-117. https://doi.org/10.55452/1998-6688-2023-20-4-109-117