kaz29Вестник Казахстанско-Британского технического университетаHerald of the Kazakh-British Technical University1998-66882959-8109Казахстанско-Британский Технический Университет10.55452/1998-6688-2023-20-4-109-117kaz29-879Research ArticleФИЗИЧЕСКИЕ НАУКИPHYSICAL SCIENCESВЛИЯНИЕ ПОТОКА КИСЛОРОДА НА ЭЛЕКТРИЧЕСКИЕ И ОПТИЧЕСКИЕ СВОЙСТВА ПЛЕНОК ITO, СИНТЕЗИРОВАННЫХ МЕТОДОМ МАГНЕТРОННОГО РАСПЫЛЕНИЯEffect of oxygen flow on electrical and optical properties of ITO films synthesized by magnetron sputtering methodhttps://orcid.org/0000-0002-7735-4881РахимоваA. Ж.RakhimovaA. Zh.

Рахимова Айгерім Жангельдіқызы, Магистр, Лаборатория альтернативной энергетики и нанотехнологий

ул. Толе би, 59, 050000, г. Алматы

Rakhimova Aigerim Zhangeldykyzy, Master’s student, Laboratory of Alternative Energy and Nanotechnologies

Tole bi 59, Almaty, 050000

aig_rakhimova@kbtu.kzhttps://orcid.org/0009-0003-0785-0526ЖирковИ. В.ZhirkovI. V.

Жирков Илья Владимирович, Студент, Лаборант ЛАЭиН,, Лаборатория альтернативной энергетики и нанотехнологий

ул. Толе би, 59, 050000, г. Алматы

Zhirkov Ilya Vladimirovich, Student, Laboratory assistant, Laboratory of Alternative Energy and Nanotechnologies

Tole bi 59, Almaty, 050000

teobaldo9723@gmail.comhttps://orcid.org/0000-0001-8200-7510НусуповК. Х.NussupovK. Kh.

Нусупов Каир Хамзаевич, Д.ф-м.н., главный научный сотрудник, Лаборатория альтернативной энергетики и нанотехнологий

ул. Толе би, 59, 050000, г. Алматы

Nussupov Kair Khamzaevich, Dr Phys.-Math. Sci , Chief Researcher, Laboratory of Alternative Energy and Nanotechnologies

Tole bi 59, Almaty, 050000

rich-famouskair@mail.ruhttps://orcid.org/0000-0002-5908-5614БейсенхановН. Б.BeisenkhanovN. B.

Бейсенханов Нуржан Бейсенханович, Д.ф-м.н., декан ШМиЗТ,, Лаборатория альтернативной энергетики и нанотехнологий

ул. Толе би, 59, 050000, г. Алматы

Beisenkhanov Nurzhan Beisenkhanovich, Dr Phys.-Math. Sci Dean of SMSGT, KBTU, Laboratory of Alternative Energy and Nanotechnologies

Tole bi 59, Almaty, 050000

beisen@mail.ruhttps://orcid.org/0000-0003-0074-431XСултановА. Т.SultanovA. T.

Султанов Асанали Талгатбекулы, Ph.D. студент, руководитель ЛАЭиН, Лаборатория альтернативной энергетики и нанотехнологий

ул. Толе би, 59, 050000, г. Алматы

Sultanov Assanali Talgatbekuly, Ph.D. student , Head of the Laboratory of Alternative Energy and Nanotechnologies, KBTU, Laboratory of Alternative Energy and Nanotechnologies

Tole bi 59, Almaty, 050000

asanalisultanovs@gmail.comКазахстанско-Британский технический университетКазахстанKazakh-British Technical UniversityKazakhstan202312122023204109117Copyright © Рахимова A.Ж., Жирков И.В., Нусупов К.Х., Бейсенханов Н.Б., Султанов А.Т., 20232023Рахимова A.Ж., Жирков И.В., Нусупов К.Х., Бейсенханов Н.Б., Султанов А.Т.Rakhimova A.Z., Zhirkov I.V., Nussupov K.K., Beisenkhanov N.B., Sultanov A.T.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestnik.kbtu.edu.kz/jour/article/view/879

Тонкие пленки легированного оловом оксида индия были синтезированы методом магнетронного распыления на постоянном токе на поверхность полированных образцов кремния и предметных стекол в смешанной аргон-кислородной атмосфере. Остальные параметры осаждения: рабочее давление, мощность магнетрона и скорость вращения подложки оставались постоянными. Толщину и плотность тонких пленок измеряли методом рентгеновской рефлектометрии. Исследовано влияние скорости потока кислорода и температуры подложки на оптические и электрические свойства. Электрические свойства (удельное сопротивление, холловская подвижность и концентрация заряда) тонких пленок измерялись методом Ван дер Пау с использованием эффекта Холла. Минимальное значение удельного сопротивления 0,52×10-3 Ом·см и максимальная подвижность заряда 28 см2В-1с-1 достигнуты при пропорциональной газовой смеси кислорода 2,6%. Спектры пропускания пленок измерялись в диапазоне длин волн от 300 до 1100 нм. Пропускание всех пленок превышает 75% в видимом и ближнем инфракрасном диапазонах. Установлено, что увеличение скорости потока кислорода и нагрев подложки до оптимального значения 150°С приводят к увеличению кристалличности пленок и, как следствие, к увеличению холловской подвижности и коэффициента пропускания.

The tin-doped indium oxide thin films were synthesized by DC magnetron sputtering on the surface of polished silicon samples and glass slides in a mixed argon-oxygen atmosphere. The other deposition parameters: operating pressure, magnetron power and substrate rotation speed were kept constant. Thickness and density of thin films were measured by X-ray Reflectometry. The effects of oxygen flow rate and substrate temperature on the optical and electrical properties were investigated. The electrical properties (resistivity, Hall mobility and charge concentration) of the thin films were measured by the Van der Pauw method using the Hall effect. The minimum value of resistivity 0.52 × 10-3 Ohm·cm, and maximum charge mobility 28 cm2V-1s-1 was achieved at an oxygen proportional gas mixture of 2.6% (0.71 sccm). The transmission spectra of the films were measured in the wavelength range from 300 to 1100 nm. The transmittance of all films exceeds 75% in the visible and near-infrared spectral ranges. It was found that increasing the oxygen flow rate and heating of the substrate up to optimal value 150°C led to an increase in the crystallinity of the films and, consequently, to an increase in the Hall mobility and the transmittance.

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The authors declare that there are no conflicts of interest present.