For citations:
Nussupov K.Kh., Beisenkhanov N.B., Kukushkin S.A., Sultanov A.T., Keiinbay S., Shynybayev D.S., Kusainova A.Zh. FORMATION OF CRYSTALLINE SiC IN NEAR-SURFACE SILICON LAYERS BY METHOD OF COORDINATED SUBSTITUTION OF ATOMS. Herald of the Kazakh-British technical university. 2023;20(2):27-35. https://doi.org/10.55452/1998-6688-2023-20-2-27-35