For citations:

Zharylgapov B., Orazbayev S.A. NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGE. Herald of the Kazakh-British technical university. 2023;20(2):6-12. (In Kazakh) https://doi.org/10.55452/1998-6688-2023-20-2-6-12