kaz29Вестник Казахстанско-Британского технического университетаHerald of the Kazakh-British Technical University1998-66882959-8109Казахстанско-Британский Технический Университет10.55452/1998-6688-2023-20-2-6-12kaz29-701Research ArticleФИЗИЧЕСКИЕ НАУКИPHYSICAL SCIENCESСИНТЕЗ НАНОЧАСТИЦ МЕТОДОМ PECVD НА ОСНОВЕ ВЧ-РАЗРЯДАNANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGEhttps://orcid.org/0009-0001-1692-2427ЖарылгаповБ.ZharylgapovB.

Жарылгапов Бердібек

ул. Аль-Фараби, 71, г. Алматы, 050000

Zharylgapov Berdibek

Al-Farabi Street, 71, Almaty, 050000

zharylgapovberdibek@gmail.comhttps://orcid.org/0000-0002-7286-9990ОразбаевС. А.OrazbayevS. A.

Оразбаев Саги

ул. Аль-Фараби, 71, г. Алматы, 050000

Orazbayev Sagi

Al-Farabi Street, 71, Almaty, 050000

sagi.orazbayev@gmail.comКазахский Национальный университет им. аль-ФарабиКазахстанAl-Farabi Kazakh National UniversityKazakhstan202301072023202612Copyright © Жарылгапов Б., Оразбаев С.А., 20232023Жарылгапов Б., Оразбаев С.А.Zharylgapov B., Orazbayev S.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestnik.kbtu.edu.kz/jour/article/view/701

Данная научная статья представляет результаты исследования синтеза углеродсодержащих наночастиц в плазме высокочастотного (ВЧ) разряда при низких давлениях в вакуумной установке. Был изучен рост углеродных наночастиц при различных параметрах плазмы, таких как изменение напряжения самосмещения, температуры и мощности разряда. Эксперимент был проведен в диапазоне давлений 0.5–1.1 мбар и мощностях 6–20 Вт. Результаты исследования показали, что время синтеза углеродных наночастиц, включая их формирование и рост, зависит от параметров плазмы. Даже незначительные изменения в температуре, давлении и мощности плазмы могут существенно изменить процессы роста и формирования наночастиц. Важным выводом данной работы является то, что повышение температуры плазмообразующего газа приводит к увеличению времени формирования углеродных наночастиц. Также были получены зависимости роста наночастиц от мощности разряда, напряжения самосмещения от давления разряда и температуры от мощности разряда. Полученные результаты предоставляют ценную информацию для понимания и контроля процесса синтеза углеродных наночастиц в плазменной среде. Это имеет важное значение для различных технологических приложений, включая области наноэлектроники и катализа.

This scientific paper presents the results of the study of the synthesis of carbon nanoparticles in radio-frequency ( RF ) discharge plasma at low pressures in a vacuum apparatus. The growth of carbon nanoparticles was studied under different plasma parameters, such as variation of self-displacement voltage, temperature, and discharge power. The experiment was performed in the pressure range of 0.5-1.1 mbarr and powers of 6-20 W. The results showed that the synthesis time of carbon nanoparticles, including their formation and growth, depends on the plasma parameters. Small changes in temperature, pressure, and plasma power can significantly change the growth and formation of nanoparticles. An important conclusion of this work is that increasing the temperature of the plasma-forming gas leads to an increase in the formation time of carbon nanoparticles. The dependences of nanoparticle growth on the discharge power, selfdisplacement voltage on the discharge pressure, and temperature on the discharge power were also obtained. The results obtained provide valuable information for understanding and controlling the synthesis process of carbon nanoparticles in the plasma environment. This is important for various technological applications, including nanoelectronics and catalysis.

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The authors declare that there are no conflicts of interest present.