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Herald of the Kazakh-British Technical University

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Batryshev D.G., Abdirakhmanov A.R., Boufendi L., Orazbayev S.A., Baikaliyev A., Ramazanov T.S. STUDY OF GROWTH EVALUATION OF NANOSTRUCTURED CARBON NITRIDE THIN LAYERS IN NITROGEN-METHANE GAS MIXTURE RADIOFREQUENCY PLASMA. Herald of the Kazakh-British Technical University. 2026;23(3):448-460. (In Russ.) https://doi.org/10.55452/1998-6688-2026-23-3-448-460

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ISSN 1998-6688 (Print)
ISSN 2959-8109 (Online)