For citations:
Keiinbay S., Nussupov K.Kh., Sultanov A.T., Tyschenko I.E., Eshanov A.P., Beisenkhanov N.B. INFLUENCE OF THE RATIO OF GASE CONSUMPTION N2/Ar AND MAGNETRON POWER ON THE DENSITY AND STOICHIOMETRIC COMPOSITION OF TINX FILMS SYNTHESIZED BY MAGNETRON SPUTTERING METHOD. Herald of the Kazakh-British technical university. 2024;21(3):302-313. (In Russ.) https://doi.org/10.55452/1998-6688-2024-21-3-302-313
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