For citations:
NUSSUPOV K.K., BEISENKHANOV N.B., SULTANOV A.T., TYSCHENKO I.E., KUSAINOVA A.Z., BUGYBAI Z.K., YSKAK K.M. IMPROVEMENT OF THE PASSIVATION PROPERTIES OF SiO2 FILMS, GROWN BY THE METHOD OF RAPID THERMAL ANNEALING, AFTER CHEMICAL RCA TREATMENT. Herald of the Kazakh-British technical university. 2022;19(2):29-38. (In Russ.) https://doi.org/10.55452/1998-6688-2022-19-2-29-38