ФИЗИКА-МЕХАНИКАЛЫҚ СИПАТТАМАЛАРЫ ЖАҚСАРТЫЛҒАН БИОМЕДИЦИНАЛЫҚ ҚОЛДАНУҒА АРНАЛҒАН ТИТАН-АЛТЫН (TI-AU) НЕГІЗІНДЕГІ ЖҰҚА ЖАБЫНДАРДЫ АЛУ ЖӘНЕ ЗЕРТТЕУ

Бұл ғылыми мақалада 450 °C жоғарғы температурада тұрақты (DC) және жоғары жиілікті (RF) тоқ режимінде вакуумдық ортада PVD (магнетрондық бүрку) әдісімен алынған Ti-Au негізіндегі жұқа жабын бетінің құрылымы мен қасиеттері зерттелді. NanoPVD қондырғысымен алынған жұқа жабындардың, қалыңдықтары орташа есеппен 1 мкм құрады. Эксперименттік зерттеулер көрсеткендей, жабындардың химиялық құрамы, микроқұрылымы және қасиеттері магнетрондық бүрку әдісінің технологиялық параметрлеріне тығыз байланысты екені анықталды. Ti-Au жабындарының микроқұрылымы мен механикалық қасиеттеріне Ag және Cu қоспаларының әсері растрлы электронды микроскопия (SEM), энергия-дисп ерсиялық микроанализ (EDX) және рентгендік дифрактометрия (XRD) әдістері арқылы зерттелді. Жабын беттінің кедір-бұдырлық сипаттамалары атомдық-күштік микроскопия (AFM) арқылы талданды, ал жабындардың қасиеттеріндегі өзгерістерді жан-жақты бағалау үшін наноқаттылық пен трибологиялық сынақтар жүргізілді. PVD әдісімен Ti₆Al₄V төсеніш бетінің модификациясы оның тозуға төзімділігін арттырып, үйкеліс коэффициентін төмендететіні көрсетілді. Рентгендік фазалық талдау нәтижелері бойынша, алынған жұқа жабындардың трибологиялық қасиеттерінің жақсаруы, тікелей негізгі Ti₃Au фазасының түзілуімен және оның мөлшерінің артуымен байланысты екені анықталды.

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