For citations:

Nussupov K.Kh., Beisenkhanov N.B., Bakranova D.I., Keiinbay S., Sultan A.A. IR SPECTROSCOPY OF A THICK SILICON CARBIDE FILM OBTAINED BY THE MAGNETRON SPUTTERING. Herald of the Kazakh-British Technical University. 2019;16(4):79-86. (In Russ.)